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Could you please check this paragraph and correct my mistakes. I am not sure I used proper words. I am afraid that might be odd.

"The results of these simulations are based on pressure of 0.3(torr) for reaction chamber and temperature of wafers’ surfaces are 615°C. The model is defined for the system and process of deposition of Silane in an industrial LPCVD system, BTU/Bruce SEMATECH with exact physical scale. For defining a model in Fluent, as most finite element softwares, geometric structure, boundary conditions, characteristic of the materials and implied equations must be defined. Three most important factors were measured as precise as possible: geometric size and scale, characteristic of materials and initial conditions. At last, we must choose a method of analysis for the whole process. Sizes of this system are collected in Table X."
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The results of these simulations are based on a pressure of 0.3 torr in the reaction chamber and a wafer surface temperature of 615°C. The model is defined for the system and process of deposition of silane in an industrial LPCVD system, a SEMATECH BTU Bruce, to exact physical scale. To initialize a model in Fluent, as in most finite-element software, geometric structure, boundary conditions, characteristic of the materials and implied equations must be defined. The three most important factors were measured as precisely as possible: geometric size and scale, characteristics of materials and initial conditions. At last, we must choose a method of analysis for the whole process. Sizes of this system are collected in Table X.

I have highlighted in color the two parts that I do not understand. Why say the thing in red, and, in green, what sizes of what system?
Thanks again enoon. Emotion: smile
enoonAt last, we must choose a method of analysis for the whole process
I think I wanted somehow describe map of my work. I do some thing until now, and now I am telling that what should I do in the next section. I don't know. I guess it help the reader of my paper to have a chain of subjects in his/her mind.

Perhaps next part helps to say what I meant:

The table X

"Making precise geometric model is essential, but what is more important, and known as a skill, is meshing. Shape and size of meshes for each part has a significant effect on the results. The most effective area of meshing is the surface of wafers, and specifically their edges.
By now, physical shape of a digital model (in a finite element software) of SEMATECH BTU Bruce LPCVD system has taken form, and it is time to define materials' characteristics of each part. Here are important parts of our model: inlet and outlet of gas flow, hot zones of the furnace and surfaces of wafers. Definable characteristics for these parts are: material, density, heat capacity and initial temperature. Specifically about injected gas, approximate portion of Silane and, in our case, nitrogen must be defined."
enoonSizes of this system are collected in Table X
I meant from this system was SEMATECH BTU Bruce.
Should I use "that" or "the" or should I mention its name? I thought it could be annoying to repeat names. If you don't feel weird, I am OK too. Emotion: smile
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The results of these simulations are based on a pressure of 0.3 torr in the reaction chamber and a wafer surface temperature of 615°C. The model is defined for the system and process of deposition of silane in an industrial LPCVD system, a SEMATECH BTU Bruce, to exact physical scale. To initialize a model in Fluent, as in most finite-element software, geometric structure, boundary conditions, characteristic of the materials and implied equations must be defined. The three most important factors were measured as precisely as possible: geometric size and scale, characteristics of materials and initial conditions. The final step is to choose a method of analysis for the whole process. The dimensions of the SEMATECH BTU Bruce LPCVD system are displayed in table X.

The best way to be clear is to be specific.
Thanks, enoon. Emotion: smile
I made a little mistake, and I think the last two sentences should be swapped..

The results of these simulations are based on a pressure of 0.3 torr in the reaction chamber and a wafer surface temperature of 615°C. The model is defined for the system and process of deposition of silane in an industrial LPCVD system, a SEMATECH BTU Bruce, to exact physical scale. To initialize a model in Fluent, as in most finite-element software, geometric structure, boundary conditions, characteristics of the materials and implied equations must be defined. The three most important factors were measured as precisely as possible: geometric size and scale, characteristics of materials and initial conditions. The dimensions of the SEMATECH BTU Bruce LPCVD system are displayed in table X. The final step is to choose a method of analysis for the whole process.
Students: We have free audio pronunciation exercises.
I am so grateful. Thank you enoon. Emotion: smile